Nano-Electrodeposits on MEMS Directional Microphones for Hearing Aid Optimization
نویسندگان
چکیده
We present an in-situ method for MEMS (microelectromechanical systems) microphone sensitivity optimization via the growth/retraction of nanoelectrodeposits to achieve high directionality in hearing aid applications. Using a DC bias at room temperature, nanoelectrodeposits are electrochemically deposited and dissolved on a Ag-doped Ge-Se solid electrolyte film on a microphone diaphragm. The growth and retraction of the nano-electrodeposits generate mass/stress redistribution on the diaphragm, tuning the microphone sensitivity to incoming acoustic sources. Acoustic measurements demonstrate that the directional microphone can achieve a 1.3 dB Directivity Index (DI) improvement upon nanoelectrodeposit growth and 0.9 dB DI reversal on nanoelectrodeposit retraction.
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